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T/CIE 117-2021 Active
T/CIE 117-2021 Mechanical shock test method for MEMS device
Abstract
This document specifies the technical requirements, test procedures, and inspection and evaluation rules for mechanical impact testing of MEMS devices in both unpowered and powered states.
This document is applicable to the development, production, and product qualification and acceptance stages of MEMS devices. Its purpose is to evaluate the impact resistance of MEMS devices when they are subjected to instantaneous mechanical impacts due to momentary forces or sudden changes in their motion states during handling, transportation, and use. The applicable mechanical impact pulse width range is 0.05 ms to 30 ms, and the peak acceleration range is 5g to 30,000g.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/CIE 117-2021 |
| CCS | Microcircuit |
| ICS | Integrated circuits, microelectronics |
| Implement Date | 2022-02-01 |
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