T/CASME 2139-2026 Active Group standards

T/CASME 2139-2026 Test method for performance of semiconductor second harmonic wafer inspection equipment

Publish Date: 2026-01-30 Implement Date: 2026-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CASME 2139-2026

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Medical electronic instruments and equipment

ICS Name: Integrated Components of Semiconductor Devices

Publish Date: 2026-01-30

Implement Date: 2026-03-01

Development Information

Related Standards

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