DB31/ 506-2020 Active Shanghai CityLocal standards

DB31/ 506-2020 The energy consumption limit per unit product for integrated circuit wafer manufacturing units

Publish Date: 2020-09-25 Implement Date: 2020-12-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: DB31/ 506-2020

Standard Type: Local standards

Standard Status: Active

is_force_gb: no

CCS Name: Technical management

ICS Name: Integrated Energy and Heat Transfer Engineering

Publish Date: 2020-09-25

Implement Date: 2020-12-01

Pages: 12 pages

Scope

This document specifies the technical requirements, statistical scope, calculation methods, and energy-saving management and measures for the unit product energy consumption (hereinafter referred to as energy consumption) limits of the integrated circuit wafer manufacturing process.
This document is applicable to the calculation and assessment of unit product energy consumption in integrated circuit wafer manufacturing enterprises, as well as the energy consumption control of new and expanded projects.
This document is not applicable to integrated circuit manufacturing enterprises with a 12-inch 40 nm and lower process technology.