GB/T 34649-2017 Active National standards

GB/T 34649-2017 Magnetron sputtering ruthenium target

GB/T 34649-2017 Magnetron sputtering ruthenium target

Publish Date: 2017-09-29 Implement Date: 2018-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34649-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Precious metals and their alloys

ICS Name: Other non-ferrous metal products

Publish Date: 2017-09-29

Implement Date: 2018-04-01

Pages: 8 pages

Scope

This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) for ruthenium targets used in magnetron sputtering. This standard applies to ruthenium targets used for coating in the microelectronics field (hereinafter referred to as "ruthenium targets").

Development Information

Word Count: 14 Thousand words Pages: 8 pages

Referenced Standards

GB/T 1804-2000 General tolerances for linear and angular dimensions without individual tolerance indications GB/T 5163-2006 Sintered metal materials, excluding hardmetals—Permeable sintered metal materials—Determination of density, oil content, and open porosity GB/T 6394-2002 Metal-methods for estimating the average grain size GB/T 6394-2017 Determination of estimating the average grain size of metal GB/T 14265-1993 General rule of chemical analysis for hydrogen, oxygen, nitrogen, carbon and sulfur in metal's materials GB/T 14265-2017 General rule of chemical analysis for hydrogen,oxygen, nitrogen, carbon and sulfur in metallic materials GB/T 23275-2009 Methods for chemical analysis of ruthenium determination of lead,iron,nickel,aluminum,copper,silver,gold,platinum,palladium, rhodium,iridium and silicon in ruthenium powder by glow discharge mass spectrometry YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies

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