YS/T 837-2012
Active
Industry standards-Non-ferrous metals
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
Basic Information
Standard Code:
YS/T 837-2012
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Precious metals and their alloys
ICS Name:
Other non-ferrous metals and their alloys
Publish Date:
2012-11-07
Implement Date:
2013-03-01
Pages:
9 pages
Scope
This standard specifies the general requirements, testing equipment, comparison test pieces, testing process, defect evaluation, and testing reports for the bonding quality inspection of sputtering target backplanes. The method uses ultrasonic longitudinal wave pulse reflection immersion C-scan inspection technology.
This standard is applicable to the inspection of defects such as holes, non-bonding, and oxide inclusions in the bonding surfaces of sputtering target backplanes using intermediate layer materials (such as soft soldering, hard soldering, and epoxy resin bonding). The non-destructive testing of bonding quality of materials for other purposes can also be used for reference.
Development Information
Referenced Standards
GJB 1580A
GJB 9712A
GB 5226.1-2002 Safety of machinery—Electrical equipment of machines—Part 1:General requirements
GB 5226.1-2008 Electrical safety of machinery—Electrical equipment of machines—Part 1:General requirements
GB/T 5226.1-2019 Electrical safety of machinery—Electrical equipment of machines—Part 1:General requirements
GB/T 9445-1999 Qualification and certification for nondestructive testing personnel
GB/T 9445-2005 Non-destructive testing—Qualification and certification of personnel
GB/T 9445-2008 Non-destructive testing—Qualification and certification of personnel
GB/T 9445-2015 Non-destructive testing—Qualification and certification of NDT personnel
GB/T 11259-1999 Standard practice for fabrication and control of steel reference blocks used in ultrasonic inspection
GB/T 11259-2008 Non-destructive testing—Practice for fabrication and control of steel reference blocks used in ultrasonic testing
GB/T 11259-2015 Non-destructive testing—Practice for fabrication and control of steel reference blocks used in ultrasonic testing
GB/T 12604.1-2005 Non-destructive testing—Terminology—Terms used in ultrasonic testing
GB/T 12604.1-2020 Non-destructive testing—Terminology—Ultrasonic testing
GB/T 17421.1-1998 Test code for machine tools—Part 1:Geometric accuracy of machines operating under no-load or finishing conditions
GB/T 17421.1-2023 Test code for machine tools—Part 1:Geometric accuracy of machines operating under no-load or quasi-static conditions
GB/T 17421.2-2000 Test code for machine tools—Part 2:Determination of accuracy and repeatability of positioning numerically controlled axes
GB/T 17421.2-2016 Test code for machine tools—Part 2:Determination of accuracy and repeatability positioning numerically controlled axes
GB/T 17421.2-2023 Test code for machine tools—Part 2:Determination of accuracy and repeatability of positioning of numerically controlled axes
GB/T 18400.6-2001 Test conditions for machining centres—Part 6:Accuracy of feeds, speeds and interpolations
GB/T 18694-2002 Non-destructive testing—Ultrasonic inspection—Characterization of search unit and sound field
GB/T 18852-2002 Ultrasonic non-destructive testing—Reference blocks and test procedures for the characterization of contact search unit beam profiles
GB/T 18852-2020 Non-destructive testing—Ultrasonic testing—Reference blocks and test procedures for the characterization of contact probe sound beams
GB/T 9445-2024 Non-destructive testing—Qualification and certification of personnels
JB/T 8771.4-1998
JB/T 9269-1999 Mountable environmental requirements of industrial process control computer system
GB/T 18400.6-2025 Test conditions for machining centres—Part 6:Accuracy of speeds and interpolations
Related Standards
GB/T 13840-1992
Abolished
GB/T 15677-1995
Replaced
GB/T 15677-1995 Lanthanum metal
GB/T 3136-1995
abolished_transferred
GB/T 3136-1995 Tantalum powders
GB/T 3463-1995
Abolished
GB/T 3463-1995 Tantalum wires
GB/T 3628-1995
Replaced
GB/T 3628-1995 Tantalum and tantalum alloy foils
GB/T 16476-1996
Replaced