T/CZZMXH 010-2024 Active Group standards

T/CZZMXH 010-2024 Measurements of radiation characteristics of 193 nm UV lamps and light source systems

Publish Date: 2024-01-16 Implement Date: 2024-01-16 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CZZMXH 010-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Fluorescent lamps and discharge lamps

Publish Date: 2024-01-16

Implement Date: 2024-01-16

Scope

Scope: This document specifies the measurement parameters and test requirements for the radiation characteristics of 193 nm UV lamps and light source systems. This document is applicable to the measurement of the radiation characteristics of 193 nm UV lamps and light source systems used in lithography machines. For the measurement of the radiation characteristics of UV lamps for other applications, reference can be made to this document for guidance. Main technical content: This document specifies the measurement parameters and test requirements for the radiation characteristics of 193 nm UV lamps and light source systems. This document is applicable to the measurement of the radiation characteristics of 193 nm UV lamps and light source systems used in lithography machines. For the measurement of the radiation characteristics of UV lamps for other applications, reference can be made to this document for guidance. 4. Measurement parameters 5. Test principles 6. Instrumentation and equipment 7. Test requirements 8. Test steps 9. Data processing