T/GDID 1099-2024 Active Group standards

T/GDID 1099-2024 Installing Guidelines for Tubular Plasma Deposition Furnace

Publish Date: 2024-02-23 Implement Date: 2024-02-23 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/GDID 1099-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Mechanical

ICS Name: Industrial services

Publish Date: 2024-02-23

Implement Date: 2024-02-23

Scope

Scope: This document specifies the terms and definitions, basic requirements, equipment positioning, installation of quartz tubes, installation of furnace mouth flanges and furnace doors, furnace covers, installation of furnace tail flanges and furnace doors, installation of graphite boat supports, installation of K-type armored thermocouples, installation of push boats and propeller assemblies, installation of tubes, installation of propellers, installation of vacuum pumps and vacuum pipelines, and requirements for power cables, signal cables, and sensors for the installation of tube-type plasma deposition furnaces used in the production of solar cell silicon wafers. This document applies to the installation process of tube-type plasma deposition furnaces for the production of solar cell silicon wafers. Main technical contents: The main technical contents include terms and definitions, basic requirements, equipment positioning, installation of quartz tubes, installation of furnace mouth flanges and furnace doors, furnace covers, installation of furnace tail flanges and furnace doors, installation of graphite boat supports, installation of K-type armored thermocouples, installation of push boats and propeller assemblies, installation of tubes, installation of propellers, installation of vacuum pumps and vacuum pipelines, and requirements for power cables, signal cables, and sensors.