T/CITS 371-2025 Active Group standards

T/CITS 371-2025 Electronic-grade tetramethoxysilane for chemical mechanical polishing (CMP) abrasives

T/CITS 371-2025 Chemical mechanical polishing (CMP) abrasive material for electronic grade tetramethyl orthosilicate (TMOS)

Publish Date: 2025-04-28 Implement Date: 2025-04-28 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CITS 371-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Comprehensive Chemical Products

Publish Date: 2025-04-28

Implement Date: 2025-04-28

Scope

Scope: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of electron-grade tetramethoxysilane for chemical mechanical polishing (CMP) abrasives. This document applies to the design, production, inspection, and use of electron-grade tetramethoxysilane for CMP abrasives. Main technical content: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of electron-grade tetramethoxysilane for CMP abrasives. This document applies to the design, production, inspection, and use of electron-grade tetramethoxysilane for CMP abrasives.