T/WHQASA 12-2024 Active Group standards

T/WHQASA 12-2024 10.5G Chemical Vapor Deposition equipment with lower heating base

Publish Date: 2024-12-30 Implement Date: 2024-12-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/WHQASA 12-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Chemical machinery

ICS Name: Other chemical equipment

Publish Date: 2024-12-30

Implement Date: 2024-12-30

Scope

Scope: This document specifies the technical requirements, testing methods, inspection rules, and packaging, transportation, and storage for the lower heating base products used in 10.5G chemical vapor deposition equipment (hereinafter referred to as "lower heating bases"). This document applies to the development, production, inspection, and delivery of lower heating base products used in 10.5G chemical vapor deposition equipment. Main technical contents: 1. Scope 2. Normative reference documents 3. Terms and definitions 4. Requirements 5. Test methods 6. Inspection rules 7. Marking and accompanying documents 8. Packaging, transportation, and storage