T/CMES 32001-2023 Active Group standards

T/CMES 32001-2023 Magnetron sputtering process specification for preparing indium oxide/tungsten-rhodium alloy/indium tin oxide (ITO/WR/ITO) composite thin films for thermocouple temperature sensors

Publish Date: 2023-06-21 Implement Date: 2023-07-21 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CMES 32001-2023

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Non-metallic minerals

Publish Date: 2023-06-21

Implement Date: 2023-07-21

Scope

Main technical content: This document provides the process specification and related regulations for preparing tungsten-rhenium alloy indium tin oxide composite film thermocouple temperature sensors by magnetron sputtering method