T/ZZB 1373-2019
Active
Group standards
T/ZZB 1373-2019 7N optical-grade ultra-pure ammonia
T/ZZB 1373-2019 7N optical-grade ultra-pure ammonia
Price:
$ 20.00
Basic Information
Standard Code:
T/ZZB 1373-2019
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2019-11-27
Implement Date:
2019-12-31
Scope
Main technical content: This standard specifies the basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage and safety requirements, and quality commitments for 7N optoelectronic-grade ultra-pure ammonia. The ammonia specified in this standard is suitable for the semiconductor industry, chemical vapor deposition of silicon nitride and gallium nitride, and can also be used as ammonia gas in production processes such as nitriding silicon or silicon oxide. Molecular formula: NH3. Relative molecular mass: 17.031 (based on the 2016 international relative atomic mass).
Development Information
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