GB/T 14293-1998
Active
T/CSEA 26-2023
Active
Group standards
T/CSEA 26-2023 Electron beam physical vapor deposition of 8YSZ ceramic target material for technical specifications
T/CSEA 26-2023 Electron beam physical vapor deposition of 8YSZ ceramic target material for technical specifications
Price:
$ 20.00
Basic Information
Standard Code:
T/CSEA 26-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Surface treatment and plating coating combined
Publish Date:
2023-02-07
Implement Date:
2023-03-01
Scope
Scope: This document specifies the technical requirements, quality assurance, marking, packaging, transportation, and storage for ceramic targets made from high-purity yttrium oxide partially stabilized zirconia (ZrO2(HfO2)-7~8 wt. %Y2O3) raw materials synthesized by chemical co-precipitation and electrofusion methods. This document applies to 8YSZ ceramic targets used in electron beam physical vapor deposition (PVD). Main technical content: Table 18 shows the chemical composition and impurity content of 8YSZ ceramic targets. Chemical composition/wt. % Main component content Impurity content Y2O3+ZrO2(HfO2) HfO2 Y2O3 Al2O3 Fe2O3 SiO2 TiO2 CaO MgO Cl- Carbon residue ≥99.65 <27-8 ≤0.02 ≤0.02 ≤0.02 ≤0.02 ≤0.02 ≤0.02 ≤0.02 ≤0.06 ≤0.15
Development Information
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