DZ/T 0101.12-1994
Active
T/CEMIA 042-2024
Active
Group standards
T/CEMIA 042-2024 Silicon Wafer Cleaning Quartz Tank
T/CEMIA 042-2024 Silicon Wafer Cleaning Quartz Tank
Price:
$ 31.00
Basic Information
Standard Code:
T/CEMIA 042-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
This document specifies the terminology and definitions, classification and marking, materials, requirements, test methods, inspection rules, and labeling, cleaning, packaging, transportation, and storage of quartz tanks used for cleaning semiconductor wafers. This document applies to quartz tanks used for cleaning semiconductor wafers, hereinafter referred to as quartz tanks.
Development Information
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