T/DLSHXH 015-2024 Active Group standards

T/DLSHXH 015-2024 Electronic gas mixture of boron trifluoride and nitrogen gas

Publish Date: 2024-08-01 Implement Date: 2024-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/DLSHXH 015-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2024-08-01

Implement Date: 2024-11-01

Scope

Main technical content: This document specifies the technical requirements, preparation, sampling, testing methods, inspection rules, marking, packaging, storage, transportation, and safety information for the electronic gas boron nitride/nitrogen gas mixture. This document is applicable to the boron nitride/nitrogen gas mixture used in the manufacturing of integrated circuits and other electronic industries.

Development Information

Related Standards

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