GB/T 4771-1984
Replaced
GB/T 45826-2025
Active
National standards
GB/T 45826-2025 Titania doped silica glass for lithography
GB/T 45826-2025 Titania doped silica glass for lithography
Price:
$ 33.00
Basic Information
Standard Code:
GB/T 45826-2025
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Quartz glass
ICS Name:
\nGlass products
Publish Date:
2025-05-30
Implement Date:
2025-12-01
Pages:
12 pages
Scope
This document specifies the requirements, inspection rules, and marking, packaging, transportation, and storage for titanium-doped quartz glass used in photolithography (hereinafter referred to as titanium-doped quartz glass), and describes the corresponding test methods.
This document is applicable to the production, inspection, delivery, and acceptance of titanium-doped quartz glass used in the photolithography reflective optical systems of semiconductor integrated circuits.
Development Information
Referenced Standards
GB/T 191-2000 Packaging—Pictorial marking for handling of goods
GB/T 191-2008 Packaging—Pictorial marking for handling of goods
GB/T 5949-1986 Test method of alveolus and gas line in transparent silica glass
GB/T 5949-2014 Test method for bubble and air line of transparent quartz glass
GB/T 7962.7-1987 Colorless optical glass test methods Examination method for extent of stria
GB/T 43881-2024 Test method for linear thermal expansion of low-expansion glass—Laser interferometry
JC/T 2205-2014 Quartz glass terminology
JC/T 2851-2024 JC/T 2851-2024 Optical quartz glass stress birefringence test method: Point scanning method
GB/T 7962.7-2025 Test methods of colourless optical glass—Part 7:Extent of striae
GB/T 191-2025 Graphical symbols marking for handling and storage of packages
Related Standards
GB/T 6552-1986
Replaced
GB/T 6552-1986 Standard test method for impact resistance of glass containers
GB 11417.1-1989
Replaced
GB 11417.1-1989 Hard corneal contact lenses
GB 11417.2-1989
Replaced
GB 11417.2-1989 Soft hydrophilic contact lenses
GB/T 12415-1990
Replaced
GB/T 12415-1990 Pharmaceutical glass containers—Stress examination— Test methods
GB/T 12416.1-1990
Abolished