GB/T 42274-2022 Active National standards

GB/T 42274-2022 Determination of the content and distribution of trace elements (magnesium,gallium) in aluminum nitride materials—Secondary ion mass spectrometry

Publish Date: 2022-12-30 Implement Date: 2023-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 42274-2022

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2022-12-30

Implement Date: 2023-04-01

Publisher: 国家市场监督管理总局、国家标准化管理委员会

Technical Committee: 全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC2)

Pages: 6 pages

Scope

本文件描述了氮化铝单晶中痕量镁和镓含量及分布的二次离子质谱测试方法。
本文件适用于氮化铝单晶中痕量镁和镓含量及分布的定量测定，测定范围为镁、镓的含量均不小于1×1016 cm-3，元素含量（原子个数百分比）不大于1%。
注：氮化铝单晶中待测元素的含量以每立方厘米中的原子个数计。

Development Information

Drafting Units:

北京科技大学、中国科学院半导体研究所、有色金属技术经济研究院有限责任公司、中国科学院青海盐湖研究所、青海圣诺光电科技有限公司

Drafting Persons:

齐俊杰、魏学成、闫丹、李素青、卫喆、胡超胜、李志超、许磊、王军喜、李晋闽、魏明、刘江华、张成荣

Word Count: 14 Thousand words Pages: 6 pages

Referenced Standards

GB/T 14264-1993 Semiconductor materials—Terms and definitions GB/T 14264-2009 Semiconductor materials—Terms and definitions GB/T 14264-2024 Terminology of semiconductor materials GB/T 22461-2008 Surface chemical analysis—Vocabulary GB/T 22461.1-2023 Surface chemical analysis—Vocabulary—Part 1:General terms and terms used in spectroscopy GB/T 22461.2-2023 Surface chemical analysis—Vocabulary—Part 2:Terms used in scanning probe microscopy GB/T 25186-2010 Surface chemical analysis—Secondary-ion mass spectrometry—Determination of relative sensitivity factors from ion-implanted reference materials GB/T 32267-2015 Terminology of performance testing for analytical instrument GB/T 22461.3-2026 Surface chemical analysis—Vocabulary—Part 3:Terms used in optical interface analysis

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