GB/T 3163-1993
Replaced
T/CASME 134-2022
Active
Group standards
T/CASME 134-2022 Atomic Layer Deposition (ALD) Powder Encapsulation Equipment
T/CASME 134-2022 Atomic Layer Deposition (ALD) Powder Encapsulation Equipment
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 134-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Mechanical
ICS Name:
Vacuum technology
Publish Date:
2022-11-24
Implement Date:
2022-12-01
Scope
Scope: This document is applicable to the manufacture of atomic layer deposition powder coating equipment; Main technical content: This document specifies the model numbering, composition and basic parameters, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of atomic layer deposition powder coating equipment.
Development Information
Related Standards
GB/T 3164-1993
Replaced
GB/T 3164-1993 Vacuum technology—Graphical symbols
GB/T 6070-1995
Replaced
GB/T 6070-1995 Vacuum flanges
GB/T 11164-1999
Replaced
GB/T 11164-1999 Vacuum coating plant generic specification
GB/T 18193-2000
Active
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 4982-2003
Replaced