T/ACCEM 612-2025 Active Group standards

T/ACCEM 612-2025 High-end quartz blank mask plate and process equipment

Publish Date: 2025-07-10 Implement Date: 2025-08-08 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ACCEM 612-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Medical electronic instruments and equipment

ICS Name: Electronic display devices

Publish Date: 2025-07-10

Implement Date: 2025-08-08

Scope

Main technical content: This document specifies the terms and definitions of high-end quartz blank masks and related process equipment, process equipment, technical requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage. This document is applicable to masks composed of quartz substrates, low-reflectivity Cr films, and photoresist layers.