T/CITS 267-2025 Active Group standards

Technical requirements for medium-frequency magnetron sputtering power supplies in T/CITS 267-2025

T/CITS 267-2025

Publish Date: 2025-02-19 Implement Date: 2025-02-19 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CITS 267-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Rectifiers, converters, and regulated power supplies

Publish Date: 2025-02-19

Implement Date: 2025-02-19

Scope

Scope: This document specifies the technical parameters, technical requirements, test methods, inspection rules, and markings, packaging, transportation, and storage of medium-frequency magnetron sputtering power supplies. This document is applicable to the design, production, inspection, and use of medium-frequency magnetron sputtering power supplies. Main technical content: This document specifies the technical parameters, technical requirements, test methods, inspection rules, and markings, packaging, transportation, and storage of medium-frequency magnetron sputtering power supplies. This document is applicable to the design, production, inspection, and use of medium-frequency magnetron sputtering power supplies.