GB/T 2413-1981
Active
T/CEMIA 033-2023
Active
Group standards
T/CEMIA 033-2023 Quartz glass tube for 8 in 12 in Semiconductor Process
T/CEMIA 033-2023 Quartz glass tube for 8 in 12 in Semiconductor Process
Price:
$ 26.00
Basic Information
Standard Code:
T/CEMIA 033-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic devices and specialized materials, parts, and structural components
ICS Name:
Special materials for electronic technology
Publish Date:
2023-06-08
Implement Date:
2023-09-08
Pages:
16 pages
Scope
This document specifies the terms and definitions, classification and product structure, technical requirements, test methods, inspection rules, marking, packaging, storage, and transportation of quartz glass furnace tubes used in the semiconductor process of 8 inches (200 mm) and 12 inches (300 mm). This document applies to quartz glass furnace tubes used in the semiconductor diffusion process of 8 inches (200 mm) and 12 inches (300 mm), including quartz outer tubes, quartz inner tubes, quartz process tubes, and quartz double-layer tubes (hereinafter referred to as "quartz glass furnace tubes"), and does not apply to quartz glass furnace tubes used in semiconductor processes of 14 nm and below.
Development Information
Referenced Standards
Related Standards
GB/T 3389.4-1982
Replaced
GB/T 3389.4-1982 Test methods for the properties of piezoelectric ceramics—Longitudinal length extension vibration mode for rod
GB/T 5594.1-1985
Active
GB/T 5594.1-1985 Test methods for properties of structure ceramic used in electronic components—Test method for gas-tightness
GB/T 5594.2-1985
Active
GB/T 5594.2-1985 Test methods for properties of structure ceramic used in electronic components—Test method for Youngs elastic modulus and Poisson ratio
GB/T 5594.3-1985
Replaced
GB/T 5594.3-1985 Test methods for properties of structure ceramic used in electronic components—Test method for mean coefficient of linear expansion
GB/T 5594.4-1985
Replaced