GB/T 43748-2024 Active National standards

GB/T 43748-2024 Microbeam analysis—Transmission electron microscopy—Method for measuring the thickness of functional thin films in integrated circuit chips

GB/T 43748-2024 Microbeam analysis—Transmission electron microscopy—Method for measuring the thickness of functional thin films in integrated circuit chips

Publish Date: 2024-03-15 Implement Date: 2024-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 43748-2024

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic optics and other physical optical instruments

ICS Name: Physicochemical analysis methods

Publish Date: 2024-03-15

Implement Date: 2024-10-01

Pages: 16 pages

Scope

This document specifies a method for measuring the thickness of functional thin films in integrated circuit chips using transmission electron microscopy/scanning transmission electron microscopy (TEM/STEM). This document is applicable to measuring the thickness of functional thin films in integrated circuit chips that are more than a few nanometers thick.

Development Information

Word Count: 21 Thousand words Pages: 16 pages

Referenced Standards

GB/T 18907-2013 Microbeam analysis—Analytical electron microscopy—Selected-area electron diffraction analysis using a transmission electron microscope GB/T 20724-2021 Microbeam analysis—Method of thickness measurement for thin crystals by convergent beam electron diffraction GB/T 40300-2021 Microbeam analysis—Analytical electron microscopy—Vocabulary GB/T 8170-1987 Rules for rounding off of numberical values GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values GB/T 30544.4-2019 Nanotechnologies—Vocabulary—Part 4:Nanostructured materials JY/T 0583-2020 Focused ion beam system analysis method general principles

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