DZ/T 0101.12-1994
Active
T/CI 512-2024
Active
Group standards
T/CI 512-2024 Silicon-based thick metal film electroplating process technology specification
T/CI 512-2024 Silicon-based thick metal film electroplating process technology specification
Price:
$ 43.00
Basic Information
Standard Code:
T/CI 512-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
This document specifies the processing capabilities, safeguard conditions, materials, safety and environmental operations, inspection, and other technical requirements of the silicon-based thick metal plating process, and establishes the process procedures for the silicon-based thick metal plating process. This document is applicable to the electroplating processing of multi-layer wiring of thick metal films in silicon-based MEMS manufacturing technology.
Development Information
Related Standards
JJG 204-1980
Active
JJG 204-1980 Meteorological Ventilation Psychrometer
SC 53-1980
Active
SC 53-1980 Transfer blade hydraulic steering gear repair quality standard
DZ 4-1981
Replaced
\nDZ 4-1981 Method for Compiling Product Models of Geological Instrumentation Equipment
SC 69-1982
Active
SC 69-1982 ZSS-12 Flash-type seawater desalination production device technical specifications
SC 72-1982
Active