T/CMES 39004-2024 Active Group standards

T/CMES 39004-2024 Semiconductor Wafer Manufacturing Smart Factory Logistics Scheduling Data Generic Specification

Publish Date: 2024-07-01 Implement Date: 2024-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CMES 39004-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: The measurement and control of industrial processes

Publish Date: 2024-07-01

Implement Date: 2024-08-01

Scope

Main technical content: This document specifies the general norms for relevant data involved in production logistics scheduling during the integrated circuit manufacturing process in a smart factory for semiconductor wafer production, including the architecture, production resource requirements, basic data models, status data models, and logistics scheduling business process data models