GB/T 25915.13-2022 Cleanrooms and associated controlled environments—Part 13:Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

Scope

This document provides guidance on achieving the required cleanliness of surfaces in cleanrooms, equipment surfaces, and material surfaces. The surfaces referred to in this document include all surfaces (external surfaces, internal surfaces). This document provides the required cleaning methods for evaluating the particle concentration (SCP) on surfaces and the chemical concentration (SCC) on surfaces to achieve specified cleanliness levels, as well as the cleaning techniques that should be considered to achieve the specified cleanliness levels. ISO 14644.9 and ISO 14644.10 provide guidance on the appropriate rate of cleaning techniques and related detection methods. This document includes the following general guidelines: -- Surface target cleanliness levels; -- Applicability of cleaning methods; -- Compatibility of surfaces with cleaning techniques; -- Evaluation of the suitability of cleaning methods. This document does not include the following items: -- Classification of cleaning methods; -- Products produced in cleanrooms; -- Specific cleaning methods related to specific surfaces; -- Detailed descriptions of the cleaning mechanisms, specific methods, and procedures of various cleaning methods; -- Detailed descriptions of material properties; -- Mechanisms of surface damage caused by cleaning processes and cleaning times; -- Adhesion force between contaminants and surfaces, as well as the adhesion process typically associated with time and processes; -- Other characteristics of particles, such as static electricity, ionization, etc.; -- Chemical reactions between molecular contaminants and surfaces; -- Surface microorganisms; -- Radioactive contamination; -- Health and safety; -- Environmental factors, such as waste disposal and emissions; -- Selection of statistical methods.

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