GB/T 31227-2014 Active National standards

GB/T 31227-2014 Test method for the surface roughness by atomic force microscope for sputtered thin films

Publish Date: 2014-09-30 Implement Date: 2015-04-15 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 31227-2014

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: \nSurface features

Publish Date: 2014-09-30

Implement Date: 2015-04-15

Pages: 10 pages

Scope

This standard specifies the method of measuring surface roughness using an atomic force microscope (AFM).
This standard is applicable to the measurement of thin films generated by the sputtering deposition method, with an average roughness Ra less than 100 nm.
For the measurement of surface roughness of other non-sputtered thin films, this method can be used as a reference.