GB/T 44538-2024 Active National standards

GB/T 44538-2024 Carbon based films—Determination of optical properties of amorphous carbon films by spectfoscopic ellipsometry

Publish Date: 2024-09-29 Implement Date: 2025-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 44538-2024

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Material protection

ICS Name: Other processing and plating

Publish Date: 2024-09-29

Implement Date: 2025-04-01

Pages: 12 pages

Scope

This document describes the use of elliptic spectroscopy to determine the optical properties (refractive index n and extinction coefficient k) of amorphous carbon-based films, as well as the method of classifying different types of amorphous carbon-based films through n-k diagrams.
This document is applicable to amorphous carbon-based films deposited by ionic vapor deposition, sputtering, arc deposition, plasma-assisted chemical vapor deposition, and hot-wire deposition.
This document is not applicable to amorphous carbon-based films modified by metals or silicon, or amorphous carbon-based films with component/property gradients in film thickness.