GB/T 3047.6-1986
Replaced
T/CASME 929-2023
Active
Group standards
T/CASME 929-2023 Semiconductor equipment precision structure component
T/CASME 929-2023 Semiconductor equipment precision structure component
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 929-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electrician
ICS Name:
Mechanical components for electronic devices
Publish Date:
2023-11-17
Implement Date:
2023-11-25
Scope
Scope: This document is applicable to the production and inspection of precision structural components for semiconductor equipment. Main technical content: This document specifies the basic requirements, raw material requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of precision structural components for semiconductor equipment.
Development Information
Related Standards
GB/T 6431-1986
Abolished
GB/T 6431-1986 Basic dimensions of narrow frame used for telecommunication equipment
GB/T 7423.1-1987
Active
GB/T 7423.1-1987 Heat sink of semiconductor devices Generic specification
GB/T 7423.2-1987
Active
GB/T 7423.2-1987 Heat sink of smiconductor devices Heat sink, extruded shapes
GB/T 7423.3-1987
Active
GB/T 7423.3-1987 Heat sink of semiconductor devices Heat sink, Staggered fingers shapes
GB/T 3047.2-1992
Abolished