GB/T 21287-2007 Replaced National standards

GB/T 21287-2007 Gases for electronic industry—Nitrogen trifluoride

GB/T 21287-2007 Gases for electronic industry—Nitrogen trifluoride

Publish Date: 2007-12-14 Implement Date: 2008-07-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 21287-2007

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2007-12-14

Implement Date: 2008-07-01

Pages: 16 pages

Scope

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, transportation, storage, and safety of nitrogen trifluoride, a bottled gas used in the electronics industry. This standard applies to nitrogen trifluoride used in the electronics industry. It is mainly used as a plasma etching agent and a cleaning agent for chemical vapor deposition in plasma processes in the electronics industry. Molecular formula: NF3 Molecular weight: 71.0019 (based on the 2001 International Relative Atomic Mass)

Development Information

Word Count: 26 Thousand words Pages: 16 pages

Superseded by the following standards

GB/T 21287-2021 Electronic specialty gas—Nitrogen trifluoride

Referenced Standards

气瓶安全监察规程危险化学品安全管理条例特种设备安全监察条例 GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB/T 5832.1-2003 Determination of moisture in gases—Part 1:Electrolytic method GB/T 5832.1-2016 Gas analysis—Determination of moisture—Part 1:Electrolytic method GB/T 6681-2003 General rules for sampling gaseous chemical products GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB 14194-1993 Rules for filling of permanent gas cylinders GB/T 14194-2006 Rules for filling of permanent gas cylinders GB/T 14194-2017 Rules for filling of compressed gas cylinders

Related Standards

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GB 4962-1985 Technical safety regulation for gaseous hydrogen use

Publish Date: 1985-03-01

GB/T 8981-1988 Replaced

GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method

Publish Date: 1988-03-15

GB/T 10627-1989 Replaced

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Publish Date: 1989-03-01

GB/T 10628-1989 Replaced

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GB 13548-1992 Replaced

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Publish Date: 1992-06-29

GB 13591-1992 Replaced

GB 13591-1992 Rules for the filling of dissolved acetylene

Publish Date: 1992-08-05