GB/T 9079-1988
Abolished
T/CASME 618-2023
Active
Group standards
T/CASME 618-2023 Pollutant Emission Standards for Semiconductor Device Manufacturing Processes
T/CASME 618-2023 Pollutant Emission Standards for Semiconductor Device Manufacturing Processes
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 618-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Environmental protection
ICS Name:
\nFixed source emission limits
Publish Date:
2023-08-11
Implement Date:
2023-08-20
Scope
Scope: This document applies to the management of pollutant emissions during the production process of discrete devices; Main technical content: This document stipulates the terms and definitions of pollutant emissions during the production process of discrete devices, general requirements, pollutant generation, pollutant emission control, waste treatment and recycling, supervision and reporting, environmental protection management, and training and publicity, etc.
Development Information
Related Standards
GB/T 5468-1991
Active
GB/T 5468-1991 Measurement method of smoke and dust emission from boilers
GB 13801-1992
Replaced
GB 13801-1992 Limit value and determination of pollutants emission for diesel oil cremator
GB 15580-1995
Replaced
GB 15580-1995 Discharge standard of water pollutants for phosphate fertilizer industry
GB 15581-1995
Replaced
GB 15581-1995 Discharge standard of water pollutants for caustic alkali and polyvinyl chloride industry
GB/T 18843-2002
Abolished