T/CIET 1177-2025 Active Group standards

T/CIET 1177-2025 Performance Requirements and Test Methods for Microwave Plasma Chemical Vapor Deposition Systems

T/CIET 1177-2025 Microwave plasma chemical vapor deposition system performance requirements and testing methods

Publish Date: 2025-04-16 Implement Date: 2025-04-16 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 1177-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Analysis Chemistry Comprehensive

Publish Date: 2025-04-16

Implement Date: 2025-04-16

Scope

Scope: This document specifies the system configuration, general requirements, performance requirements, and testing methods of microwave plasma chemical vapor deposition systems. This document is applicable to microwave plasma chemical vapor deposition systems. Main technical content: This document specifies the system configuration, general requirements, performance requirements, and testing methods of microwave plasma chemical vapor deposition systems. This document is applicable to microwave plasma chemical vapor deposition systems.