GB/T 3656-1983
Replaced
YS/T 26-2016
Active
Industry standards-Non-ferrous metals
YS/T 26-2016 Test methods for edge contour of silicon wafers
YS/T 26-2016 Test methods for edge contour of silicon wafers
Basic Information
Standard Code:
YS/T 26-2016
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
\nMetal material testing
Publish Date:
2016-07-11
Implement Date:
2017-01-01
Pages:
12 pages
Scope
This standard specifies the inspection method for the edge profile (including notches) of silicon wafers.
This standard is applicable to the inspection of the edge profile (including notches) of chamfered silicon wafers. The inspection of the edge profile of wafers made of other materials such as gallium arsenide can be carried out by referring to this standard.
Development Information
Replace the following standards
Referenced Standards
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced