GB/T 14293-1998
Active
T/SZMES 3-2021
Active
Group standards
T/SZMES 3-2021 Thickness stress measurement using bending method
T/SZMES 3-2021 Thickness stress measurement using bending method
Price:
$ 20.00
Basic Information
Standard Code:
T/SZMES 3-2021
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Surface treatment and plating coating combined
Publish Date:
2021-05-28
Implement Date:
2021-06-01
Scope
Scope: This document specifies the terms and definitions, measurement principles, measurement instruments, sample requirements, measurement conditions, parameter determination, measurement, film stress calculation, and test reports for film stress measurement based on the substrate bending method. This document is applicable to film stress measurement based on the substrate bending method; Main technical content: This document specifies the terms and definitions for film stress measurement based on the substrate bending method, including: substrate, film, sample, thickness, coating, physical vapor deposition technology, and radius of curvature. Measurement principles: Measure the radius of curvature of the substrate before and after single-sided coating, the initial radius of curvature of the substrate, and the radius of curvature of the substrate (coated surface). Using the Stoney formula, the film stress is calculated.
Development Information
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