GB/T 4298-1984
Abolished
GB/T 42158-2023
Active
National standards
GB/T 42158-2023 Micro-electromechanical systems technology(MEMS)—Description and measurement methods for micro trench and pyramidal needle structures
GB/T 42158-2023 Micro-electromechanical systems technology(MEMS)—Description and measurement methods for micro trench and pyramidal needle structures
Basic Information
Standard Code:
GB/T 42158-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Other discrete semiconductor devices
Publish Date:
2023-03-17
Implement Date:
2023-07-01
Pages:
23 pages
Scope
This document describes the micron-scale trench structure and pyramidal needle structure, and provides measurement examples of the geometric shapes of the two structures. In this document, the depth of the trench structure is 1μm to 100μm, and the width of the trench and the spacing between the trenches are both 5μm to 150μm, with a depth-to-width ratio of 0.0067 to 20. The pyramidal needle structure has three or four sides, with a height, lateral width, and longitudinal width of 2μm or more, and the outer contour dimensions can be contained within a cube with an edge length of 100μm.
This document is applicable to MEMS structure design and the evaluation of the geometric shapes of MEMS structures after processing.
Development Information
Adopt standards
IEC 62047-26:2016
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