GB/T 32817-2016 Active National standards

GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS

GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS

Publish Date: 2016-08-29 Implement Date: 2017-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 32817-2016
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: Microcircuit
ICS Name: Other discrete semiconductor devices
Publish Date: 2016-08-29
Implement Date: 2017-03-01
Pages: 19 pages

Scope

This standard describes the general specifications for microelectromechanical systems (MEMS) manufactured using semiconductors, sets forth the general procedures for quality assessment in the IECQ CECC system, and provides guidelines for the description and testing of electrical, optical, mechanical, and environmental characteristics. This standard applies to all types of MEMS devices, such as sensors and radio frequency MEMS, but excludes optical MEMS, biological MEMS, micro total analysis systems (MicroTAS), and micro energy MEMS.

Development Information

Word Count: 34 Thousand words Pages: 19 pages

Referenced Standards

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Adopt standards

IEC 62047-4:2008

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