GB/T 3143-1982
Active
GB/T 47073-2026
Active
National standards
GB/T 47073-2026 Surface chemical analysis—Depth profiling—Non-destructivedepth profiling of nanoscale heavy metal oxide thin films onSi substrates with medium energy ion scattering
GB/T 47073-2026 Surface chemical analysis—Depth profiling—Non-destructivedepth profiling of nanoscale heavy metal oxide thin films onSi substrates with medium energy ion scattering
Price:
$ 65.00
Basic Information
Standard Code:
GB/T 47073-2026
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Basic standards and general methods
ICS Name:
Chemical analysis
Publish Date:
2026-01-28
Implement Date:
2026-08-01
Pages:
36 pages
Scope
This document describes a method for quantitatively analyzing the depth of ultra-thin amorphous heavy metal oxide films on silicon substrates using medium-energy ion scattering (MEIS).
Development Information
Referenced Standards
ISO 18115-1:2013
ISO 18115-2:2013
Adopt standards
ISO 23170:2022
Related Standards
GB/T 4472-1984
Replaced
GB/T 4472-1984 General rule for determination of density and relative density for chemical products
GB/T 4946-1985
Replaced
GB/T 4946-1985 Terms of gas chromatography
GB/T 5274-1985
Replaced
GB/T 5274-1985 Gas analysis—Preparation of calibration gas mixtures—Weighing methods
GB/T 5831-1986
Replaced
GB/T 5831-1986 Determination of trace oxygen in the gases—Colorimetric method
GB/T 5832.2-1986
Replaced