GB/T 4855-1984
Abolished
GB/T 42896-2023
Active
National standards
GB/T 42896-2023 Micro-electromechanical systems(MEMS) technology—Impact test method for nanostructures of silicon based MEMS
GB/T 42896-2023 Micro-electromechanical systems(MEMS) technology—Impact test method for nanostructures of silicon based MEMS
Basic Information
Standard Code:
GB/T 42896-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2023-08-06
Implement Date:
2023-12-01
Pages:
11 pages
Scope
This document describes the requirements and test methods for impact testing of nanoscale film structures along the thickness direction in silicon-based MEMS manufacturing technology. This document is applicable to the impact resistance testing of nanoscale structures manufactured by microelectronics processes under a single impact load.
Development Information
Referenced Standards
GB/T 2900.28-1994 Electrotechnical terminology—Electric tool
GB/T 2900.28-2007 Electrotechnical terminology—Electric tool
GB/T 26111-2010 Micro-electromechanical system technology—Terms
GB/T 26111-2023 Micro-electromechanical system technology—Terms
GB/T 36416.1-2018 Testing machine vocabulary—Part 1:Material testing machines
Related Standards
GB/T 3434-1986
Abolished
GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits
GB/T 3431.2-1986
Active
GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits—Letter symbols for function of pins
GB/T 6648-1986
Active
GB/T 6648-1986 Blank detail specification for semiconductor integrated circuit static read/write memories
GB/T 6800-1986
Abolished
GB/T 6800-1986 General principles of measuring methods of audio power amplifiers for semicomductor audio integrated circuits
GB/T 3435-1987
Abolished