GB/T 4855-1984
Abolished
GB/T 26111-2010
Replaced
National standards
GB/T 26111-2010 Micro-electromechanical system technology—Terms
GB/T 26111-2010 Micro-electromechanical system technology—Terms
Basic Information
Standard Code:
GB/T 26111-2010
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Microcircuit
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2011-01-10
Implement Date:
2011-10-01
Pages:
36 pages
Scope
This standard specifies the general terms and definitions related to materials, design, processing, packaging, measurement, and devices in the field of microelectromechanical systems (MEMS).
This standard is applicable to research, development, evaluation, and application in the field of MEMS.
Development Information
Superseded by the following standards
Referenced Standards
Related Standards
GB/T 3434-1986
Abolished
GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits
GB/T 3431.2-1986
Active
GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits—Letter symbols for function of pins
GB/T 6648-1986
Active
GB/T 6648-1986 Blank detail specification for semiconductor integrated circuit static read/write memories
GB/T 6800-1986
Abolished
GB/T 6800-1986 General principles of measuring methods of audio power amplifiers for semicomductor audio integrated circuits
GB/T 3435-1987
Abolished