GB/T 28634-2025 Microbeam analysis—Electron probe microanalysis—Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy

Scope

This document specifies the requirements for quantitative analysis of elements within a micron-scale volume of a sample using an electron probe microanalyzer or a wavelength-dispersive spectrometer (WDS) installed in a scanning electron microscope (SEM) through the interaction of an electron beam with the sample to generate X-rays. This document also includes the following content: — The principle of quantitative analysis; — The general range of elements, mass fractions, and standard materials involved in this method; — The general requirements for instruments; — The basic processes related to sample preparation, experimental condition selection, analytical measurement, and reporting. This document is applicable to the quantitative analysis of samples with smooth, uniform surfaces that are vertically irradiated by an electron beam. There are no special requirements for the instrument or data processing software. Users are advised to obtain information such as the instrument installation conditions, detailed operating procedures, and instrument specifications from the instrument manufacturer.

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