GB/T 1423-1996
Active
GB/T 31351-2014
Replaced
National standards
GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
Basic Information
Standard Code:
GB/T 31351-2014
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Non-destructive testing methods for metals
ICS Name:
Other testing methods for metal materials
Publish Date:
2014-12-31
Implement Date:
2015-09-01
Pages:
8 pages
Scope
This standard specifies a non-destructive testing method for the microtube density of 4H and 6H single-crystal silicon carbide polished wafers.
This standard is applicable to the measurement of the microtube density of 4H and 6H single-crystal silicon carbide polished wafers after single-sided or double-sided polishing, where the radial size of the microtubes ranges from one micron to several tens of microns.
Development Information
Superseded by the following standards
Related Standards
GB/T 1424-1996
Active
GB/T 1424-1996 Method of measurement of resistivity of precious metals and their alloys
GB/T 1425-1996
Replaced
GB/T 1425-1996 Determination of melting temperature range for precious metals and their alloys—Testing method of thermal analysis
GB/T 17433-1998
Replaced
GB/T 17433-1998 Foundation terms for chemical analysis of metallurgical products
GB/T 4334.1-2000
Replaced
GB/T 4334.1-2000 Method of 10 per cent oxalic acid etch test for stainless steels
GB/T 4334.2-2000
Replaced