GB/T 30868-2025 Active National standards

GB/T 30868-2025 Test method for micropipe density of monocrystalline silicon carbide

GB/T 30868-2025 Test method for micropipe density of monocrystalline silicon carbide

Publish Date: 2025-08-01 Implement Date: 2026-02-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 30868-2025

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: \nTest methods for the physical properties of metals

ICS Name: \nMetal material testing

Publish Date: 2025-08-01

Implement Date: 2026-02-01

Pages: 12 pages

Scope

This document describes the testing methods for the microtube density of silicon carbide single crystals, including chemical etching and polarized light methods.
This document is applicable to the testing of the microtube density of silicon carbide single crystals.

Development Information

Word Count: 15 Thousand words Pages: 12 pages

Replace the following standards

GB/T 30868-2014 Test method for measuring micropipe density of monocrystalline silicon carbide wafers—Chemically etching GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers

Referenced Standards

GB/T 14264-1993 Semiconductor materials—Terms and definitions GB/T 14264-2009 Semiconductor materials—Terms and definitions GB/T 14264-2024 Terminology of semiconductor materials GB/T 43612-2023 Collection of metallographs on defects in silicon carbide crystal materials

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