DZ/T 0101.12-1994
Active
T/ICMTIA 4.2-2020
Active
Group standards
T/ICMTIA 4.2-2020 Fluorinated Ar photoresist monomer for integrated circuits Part 2: Solid methyl acrylate type
T/ICMTIA 4.2-2020 Fluorinated Ar photoresist monomer for integrated circuits Part 2: Solid methyl acrylate type
Price:
$ 43.00
Basic Information
Standard Code:
T/ICMTIA 4.2-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
This document specifies the terms and definitions, product types and structural characteristics, technical requirements, analysis and detection methods, process requirements, packaging, storage, and transportation requirements for fluorinated argon photoresist monomers for integrated circuits - Part 2: Solid methacrylate compounds. This document is applicable to monomers synthesized from organic raw materials, solvents, suitable polymerization inhibitors, and other components, which are refined and suitable for the preparation of fluorinated argon resins.
Development Information
Same series standard
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