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DB31/ 506-2020 Active
DB31/ 506-2020 The energy consumption limit per unit product for integrated circuit wafer manufacturing units
Abstract
This document specifies the technical requirements, statistical scope, calculation methods, and energy-saving management and measures for the unit product energy consumption (hereinafter referred to as energy consumption) limits of the integrated circuit wafer manufacturing process.
This document is applicable to the calculation and assessment of unit product energy consumption in integrated circuit wafer manufacturing enterprises, as well as the energy consumption control of new and expanded projects.
This document is not applicable to integrated circuit manufacturing enterprises with a 12-inch 40 nm and lower process technology.
General Product Information
| Document Type | Shanghai CityLocal standards |
|---|---|
| Standard Status | Active |
| Standard Code | DB31/ 506-2020 |
| CCS | Technical management |
| ICS | Integrated Energy and Heat Transfer Engineering |
| Implement Date | 2020-12-01 |
Price
$ 32
Subtotal
$ 32
Tax
$ 0.00
Order Total (incl. tax)
$ 32