GB/T 14603-2009
GB/T 14603-2009 Gases for electronic industry—Boron trifluoride
Abstract
This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, storage and transportation, and safety requirements for boron trifluoride used in the electronics industry.
This standard applies to boron trifluoride obtained by direct compounding from fluorine gas and elemental boron, and purified by purification; and boron trifluoride obtained by thermal decomposition from sodium fluoroborate and purified by purification. It is mainly used for ion implantation and doping in the production of semiconductor devices and integrated circuits.
Molecular formula: BF3
Relative molecular mass: 67.805 (calculated based on the 2005 International Atomic Weight Table).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 14603-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |