GB/T 14603-2009 Gases for electronic industry—Boron trifluoride

Scope

This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, storage and transportation, and safety requirements for boron trifluoride used in the electronics industry.
This standard applies to boron trifluoride obtained by direct compounding from fluorine gas and elemental boron, and purified by purification; and boron trifluoride obtained by thermal decomposition from sodium fluoroborate and purified by purification. It is mainly used for ion implantation and doping in the production of semiconductor devices and integrated circuits.
Molecular formula: BF3
Relative molecular mass: 67.805 (calculated based on the 2005 International Atomic Weight Table).

Development Information

Replace the following standards

Superseded by the following standards

Referenced Standards

Related Standards