GB/T 30116-2013 Active
GB/T 30116-2013 Requirements for semiconductor manufacturing facility electromagnetic compatibility
Abstract
This standard specifies the electromagnetic compatibility (EMC) requirements to ensure the reliable operation of semiconductor production facilities and equipment used for the production of semiconductor devices.
This standard applies to facilities and equipment used for the production of semiconductor devices, which include all facility alarms, safety, communication and control systems, process equipment, measurement equipment, automation equipment, and information technology equipment.
This standard does not apply to the equipment and facilities used for the packaging and functional testing of integrated circuits, nor to the static electricity that may be generated during the semiconductor production process.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 30116-2013 |
| CCS | Electronic industry production equipment |
| ICS | Electronic product production equipment |
| Implement Date | 2014-04-15 |