GB/T 15861-2012
Active
GB/T 30116-2013
Active
National standards
GB/T 30116-2013 Requirements for semiconductor manufacturing facility electromagnetic compatibility
GB/T 30116-2013 Requirements for semiconductor manufacturing facility electromagnetic compatibility
Basic Information
Standard Code:
GB/T 30116-2013
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic industry production equipment
ICS Name:
Electronic product production equipment
Publish Date:
2013-12-17
Implement Date:
2014-04-15
Pages:
10 pages
Scope
This standard specifies the electromagnetic compatibility (EMC) requirements to ensure the reliable operation of semiconductor production facilities and equipment used for the production of semiconductor devices.
This standard applies to facilities and equipment used for the production of semiconductor devices, which include all facility alarms, safety, communication and control systems, process equipment, measurement equipment, automation equipment, and information technology equipment.
This standard does not apply to the equipment and facilities used for the packaging and functional testing of integrated circuits, nor to the static electricity that may be generated during the semiconductor production process.
Development Information
Referenced Standards
GB/T 17626.2-2006 Electromagnetic compatibility—Testing and measurement techniques—Electrostatic discharge immunity test
GB/T 17626.3-2006 Electromagnetic compatibility—Testing and measurement techniques—Radiated, radio-frequency, electromagnetic field immunity test
GB/T 17626.4-2008 Electromagnetic compatibility—Testing and measurement techniques—Electrical fast transient/burst immunity test
GB/T 17626.5-2008 Electromagnetic compatibility—Testing and measurement techniques—Surge immunity test
GB/T 17626.16-2007 Electromagnetic compatibility—Testing and measurement techniques—Test for immunity to conducted,common mode disturbances in the frequency range 0 Hz to 150 kHz
GB 9254-1998 Information technology equipment—Radio disturbance characteristics—Limits and methods of measurement
GB/T 9254-2008 Information technology equipment—Radio disturbance characteristics—Limits and methods of measurement
GB/T 9254.1-2021 Information technology equipment,multimedia equipment and receivers—Electromagnetic compatibility—Part 1:Emission requirements
GB/T 9254.2-2021 Information technology equipment,multimedia equipment and receivers—Electromagnetic compatibility—Part 2:Immunity requirements
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