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GB/T 30656-2014

GB/T 30656-2014 Polished monocrystalline silicon carbide wafers

Available format(s)
PDF
Language(s)
Chinese
Publish Date
2014-12-31

Abstract

This standard specifies the requirements, inspection methods, inspection rules, marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) for 4H and 6H silicon carbide single-crystal polished wafers.
This standard applies to silicon carbide single-crystal polished wafers prepared by single- or double-sided polishing of 4H and 6H silicon carbide single-crystal grinding wafers. The products are mainly used to fabricate epitaxial substrates for semiconductor lighting and power electronic devices.

General Product Information

Document Type National standards
Standard Status Replaced
Standard Code GB/T 30656-2014
CCS Compound semiconductor materials
ICS Semiconductor materials
Implement Date 2015-09-01
Price $ 47
Subtotal $ 47
Tax $ 0.00
Order Total (incl. tax) $ 47

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