GB/T 44538-2024 Active
GB/T 44538-2024 Carbon based films—Determination of optical properties of amorphous carbon films by spectfoscopic ellipsometry
Abstract
This document describes the use of elliptic spectroscopy to determine the optical properties (refractive index n and extinction coefficient k) of amorphous carbon-based films, as well as the method of classifying different types of amorphous carbon-based films through n-k diagrams.
This document is applicable to amorphous carbon-based films deposited by ionic vapor deposition, sputtering, arc deposition, plasma-assisted chemical vapor deposition, and hot-wire deposition.
This document is not applicable to amorphous carbon-based films modified by metals or silicon, or amorphous carbon-based films with component/property gradients in film thickness.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 44538-2024 |
| CCS | Material protection |
| ICS | Other processing and plating |
| Implement Date | 2025-04-01 |