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GB/T 18867-2014 Active
GB/T 18867-2014 Gases for electronic industry—Sulphur hexaflouride
Abstract
This standard specifies the technical requirements, test methods, marking, packaging, storage, and safety of sulfur hexafluoride. This standard applies to sulfur hexafluoride prepared by the direct reaction of sulfur and fluorine and subsequent refining and purification. This product is mainly used as a cleaning agent for chemical vapor deposition chambers and a plasma etching agent in the electronics industry. Molecular formula: SF6. Relative molecular mass: 146.0564192 (calculated according to the 2007 International Relative Atomic Mass).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 18867-2014 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2015-07-01 |
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$ 29.00
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$ 29.00
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$ 29.00