GB 4962-1985
Replaced
GB/T 18867-2014
Active
National standards
GB/T 18867-2014 Gases for electronic industry—Sulphur hexaflouride
GB/T 18867-2014 Gases for electronic industry—Sulphur hexaflouride
Basic Information
Standard Code:
GB/T 18867-2014
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2014-12-22
Implement Date:
2015-07-01
Pages:
9 pages
Scope
This standard specifies the technical requirements, test methods, marking, packaging, storage, and safety of sulfur hexafluoride. This standard applies to sulfur hexafluoride prepared by the direct reaction of sulfur and fluorine and subsequent refining and purification. This product is mainly used as a cleaning agent for chemical vapor deposition chambers and a plasma etching agent in the electronics industry. Molecular formula: SF6. Relative molecular mass: 146.0564192 (calculated according to the 2007 International Relative Atomic Mass).
Development Information
Replace the following standards
Superseded by the following standards
Referenced Standards
GB/T 28726-2012 Gas analysis—Gas chromatograph with helium ionization detector
气瓶安全监察规程(2000版)
危险化学品安全管理条例(2002版)
GB 190-1990 Labels for packages of dangerous goods
GB 190-2009 Packing symbol of dangerous goods
GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling
GB/T 5099-1994 Seamless steel gas cylinders
GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa
GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders
GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders
GB/T 5832.1-2003 Determination of moisture in gases—Part 1:Electrolytic method
GB/T 5832.1-2016 Gas analysis—Determination of moisture—Part 1:Electrolytic method
GB/T 5832.3-2011 Determination of moisture in gases—Part 3:The method of Cavity Ring-Down Spectroscopy
GB 7144-1999 Colored cylinder mark for gases
GB/T 7144-2016 Coloured cylinder mark for gases
GB/T 8170-1987 Rules for rounding off of numberical values
GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values
GB 12022-1989 Sulphur hexafluoride for industrial use
GB/T 12022-2006 Sulphur hexafluoride for industrial use
GB/T 12022-2014 Industrial sulfur hexafluoride
GB 14193-1993 Rules for filling of liquefied gas cylinders
GB/T 14193-2009 Rules for filling of liquefied gas cylinders
GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals
GB 15258-2009 General rules for preparation of precautionary label for chemicals
GB 16804-1997 Precautionary labels for gas cylinders
GB/T 16804-2011 Precautionary labels for gas cylinders
GB/T 26571-2011 Specification for the shelf life of a specialty gas
GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder
GB/T 12022-2025 Industrial sulphur hexafluoride
GB/T 5832.3-2025 Gas analysis—Determination of moisture in gases—Part 3:The method of cavity ring-down spectroscopy
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced